Tutorial 1: Fundamentals and Trends of Plasma Surface Processing

The tutorial will cover the fundamentals of selected modern plasma processes and their applications in research and industry. Among other topics, High-Power Impulse Magnetron Sputtering (HiPIMS) will be a major subject. The lectures will be given by internationally recognized senior scientists.

The tutorial will be organized by the German PISE Group (PLASMA GERMANY) in cooperation with EFDS, and chaired by Christian Oehr, Fraunhofer-Institut für Grenzflächen- und Bioverfahrenstechnik (IGB), Stuttgart (GER).

This tutorial (PDF, 10KB) will be held on Sunday, September 12, 2010, 9:00 - 18:00, Room Zugspitze.

 

09:00-10:30

Modelling of technical Plasmas
Prof. Dr. R.P. Brinkmann, Bochum

10:30-10:40

Break

10:40-12:10

Nanostructures by Ion Bombardment
Prof. Dr. W. Moeller, Dresden

12:10-13:00

Lunch

13:00-14:30

HiPIMS - from plasma physics to industrial application
Prof. Dr. U. Helmersson, Linkoeping

14:30-14:40

Break

14:40-16:10

Dielectric barrier discharges for surface Treatment at ambient pressure
Prof. Dr. C.-P. Klages, Braunschweig

16:10-16:30

Coffee Break

16:30-18:00

Plasma Treatment of Polymers and Plasma Polymerization
Dr. C. Oehr, Stuttgart